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  4. Wafer-Handling

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Wafer handling

One igus® e-chain® of the E6 family accelerates the work sequences in the case of this application for wafer handling in the chip production industry. With the E6, the supply of energy at accelerations of up to 4 m/s2 and at speeds of up to 6 metres per second is not a problem. The minimum abrasion is also very important because a high degree of cleanliness is a decisive factor in the chip production industry. The E6 is cleanroom-suitable with IPA Fraunhofer certification.


Schmid Technology Systems, Marijan Strugar,
Niedereschach, Germany
Wafer handling

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e-chain® E6 system

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igus® GmbH points out that it does not sell any products of the companies Allen Bradley, B&R, Baumüller, Beckhoff, Lahr, Control Techniques, Danaher Motion, ELAU, FAGOR, FANUC, Festo, Heidenhain, Jetter, Lenze, LinMot, LTi DRiVES, Mitsubishi, NUM,Parker, Bosch Rexroth, SEW, Siemens, Stöber and all other drive manufacturers mention on this website. The products offered by igus® are those of igus® GmbH